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EVIDENT

LEXT-OLS5100 Confocal Laser Scanning Microscope for Material Analysis

Reference: EVI-LEXT-OLS5100

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3D laser confocal microscope for non-contact surface metrology.
The Olympus / Evident LEXT OLS5100 offers submicron-level precision for material inspection and quality control.

- Guaranteed submicron accuracy in 3D measurement (ISO 25178 compatible)
- High-speed scanning and panoramic stitching for large-area coverage
- Advanced optics with low aberration across the field of view
- Automated analysis and intuitive interface streamline operation
- Suited for metals, semiconductors, polymers, and more

Used in R&D and QC across industries. Analis can configure the system to your inspection needs.

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    LEXT-OLS5100 Confocal Laser Scanning Microscope for Material Analysis

    Related documents

    DOCUMENT NAME

    RELEASE DATE

    DOWNLOAD

    Brochure EVIDENT LEXT-OLS5100 3D Measuring Laser Microscope EN.pdf
    26 / 03 / 2025
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    Related accessories, consumables & products

    LEXT OLS5500 3D Optical Profilometer for Surface Metrology
    EVIDENT

    LEXT OLS5500 3D Optical Profilometer for Surface Metrology

    Reference : EVI-LEXT-OLS5500
    The Evident LEXT™ OLS5500 is a hybrid 3D optical profilometer that combines laser scanning microscopy (LSM), white light interferometry (WLI), and focus variation microscopy (FVM) in one platform. It delivers precise, traceable surface measurements from the nanometer to the millimeter scale, enabling confident inspection in R&D, QA, and QC environments.

    Designed for challenging materials, including reflective, transparent, steep, or low-contrast surfaces, the OLS5500 provides exceptional clarity, guaranteed accuracy, and repeatable results supported by verifiable calibration. Its advanced WLI mode improves throughput by up to 40× compared to conventional LSM, while dedicated LEXT objectives ensure reliable measurements across complex geometries.

    Key Advantages at a Glance

    • 3-in-1 hybrid profilometry (LSM, WLI, FVM) for comprehensive surface analysis
    • Guaranteed accuracy and repeatability for LSM and WLI measurements*
    • Nanometer-scale measurement noise (1 nm with LEXT 100X LSM objectives; 0.08 nm with WLI optics)
    • High-speed WLI acquisition providing up to 40× faster throughput
    • Advanced optics with high-NA WLI lenses and distortion-free LEXT objectives
    • 4K imaging, contrast enhancement, and shading correction for clear visualization of every surface type
    • Automated workflows including Smart Scan II, tilt-adjustment assistance, measurement macros, and Smart Judge data filtering
    *As specified by Evident, valid after calibration under manufacturer-defined conditions.

    Suitable For

    The OLS5500 supports accurate, non-contact surface metrology across a wide range of research and industrial needs:
    • Semiconductors and MEMS: wafer roughness, step height, pattern fidelity, microcrack detection
    • Electronics: copper traces, PCB features, defect and wear analysis
    • Polymers and composites: transparent films, layered materials, surface defects
    • Metals and alloys: finishing quality, machining evaluation, grain and texture analysis
    • Coatings and surface treatments: film thickness, slope measurement, uniformity inspection
    Used in R&D, process development, and production QC, the OLS5500 delivers trusted, traceable 3D data for demanding surface characterization workflows.

    Download brochure below for full specifications.
    Ask Analis' local Benelux experts for more information, a demonstration, or a personalized quote.