EVIDENT

LEXT OLS5500 3D Optical Profilometer for Surface Metrology

Reference: EVI-LEXT-OLS5500

The Evident LEXT™ OLS5500 is a hybrid 3D optical profilometer that combines laser scanning microscopy (LSM), white light interferometry (WLI), and focus variation microscopy (FVM) in one platform. It delivers precise, traceable surface measurements from the nanometer to the millimeter scale, enabling confident inspection in R&D, QA, and QC environments.

Designed for challenging materials, including reflective, transparent, steep, or low-contrast surfaces, the OLS5500 provides exceptional clarity, guaranteed accuracy, and repeatable results supported by verifiable calibration. Its advanced WLI mode improves throughput by up to 40× compared to conventional LSM, while dedicated LEXT objectives ensure reliable measurements across complex geometries.

Key Advantages at a Glance

3-in-1 hybrid profilometry (LSM, WLI, FVM) for comprehensive surface analysis
Guaranteed accuracy and repeatability for LSM and WLI measurements*
Nanometer-scale measurement noise (1 nm with LEXT 100X LSM objectives; 0.08 nm with WLI optics)
High-speed WLI acquisition providing up to 40× faster throughput
Advanced optics with high-NA WLI lenses and distortion-free LEXT objectives
4K imaging, contrast enhancement, and shading correction for clear visualization of every surface type
Automated workflows including Smart Scan II, tilt-adjustment assistance, measurement macros, and Smart Judge data filtering

*As specified by Evident, valid after calibration under manufacturer-defined conditions.

Suitable For

The OLS5500 supports accurate, non-contact surface metrology across a wide range of research and industrial needs:

• Semiconductors and MEMS: wafer roughness, step height, pattern fidelity, microcrack detection

• Electronics: copper traces, PCB features, defect and wear analysis

• Polymers and composites: transparent films, layered materials, surface defects

• Metals and alloys: finishing quality, machining evaluation, grain and texture analysis

• Coatings and surface treatments: film thickness, slope measurement, uniformity inspection

Used in R&D, process development, and production QC, the OLS5500 delivers trusted, traceable 3D data for demanding surface characterization workflows.

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LEXT OLS5500 3D Optical Profilometer for Surface Metrology

Evident LEXT™ OLS5500 maintain sharpness and phase stability where others can’t - ensuring every feature stays true to form.webp

Evident LEXT™ OLS5500 bringing out subtle surface relief and fine boundaries invisible under conventional lighting.webp

Evident LEXT™ OLS5500 maintaining shape fidelity across the entire field of view.webp

Evident LEXT™ OLS5500 Comparison stitched images of a wafer.webp

Evident LEXT™ OLS5500 Left image is without DIC - Right image- Color image with DIC–clear definition of hard disk landing zone structures.webp

Technical information

Category	Specification
Measurement Principles	Laser Scanning Microscopy (LSM), White Light Interferometry (WLI), Focus Variation Microscopy (FVM)
Measurement Range	From nanometer-scale features (WLI/LSM) to millimeter-scale structures (FVM)
Total Magnification	54× – 17,280×
Field of View	16 µm – 5,120 µm (depending on objective)
Height Repeatability (LSM)	0.45 µm (5×), 0.1 µm (10×), 0.03 µm (20×), 0.012 µm (50×/100×)
Height Repeatability (WLI)	0.3%
Guaranteed Measurement Noise	1 nm (LSM, MPLAPON 100× LEXT objective) / 0.08 nm (WLI)
Accuracy (LSM)	0.15 + L/100 μm (L = measurement length)
Surface Topography Repeatability (WLI)	0.08 nm
Max Points per Measurement	4096 × 4096 px (up to 400 megapixels stitched)
Stage Travel	100 × 100 mm (SAF/EAF models) or 300 × 300 mm (LAF model)
Maximum Sample Height	100 mm (SAF), 210 mm (EAF), 37 mm (LAF)
Laser Source	405 nm, Class 2
Color Imaging	White LED, CMOS sensor
Objective Options	LEXT LSM objectives (10×–100×), WLI Mirau objectives (10×/20×/50×), long-working-distance variants
Imaging Enhancements	4K imaging, laser DIC, color DIC, top-surface detection filter, Intelligent Shading Correction
Automation & Workflow Tools	Smart Scan II, Smart Judge, macro automation, seamless autofocus, tilt-adjustment assistance
Software	PRECiV (2D/3D analysis, reporting, AI-assisted workflows)

LEXT OLS5500 3D Optical Profilometer for Surface Metrology

Reference: EVI-LEXT-OLS5500

Key Advantages at a Glance

Suitable For

Technical information

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